Smart Materials and Structures vol:15 issue:1 pages:S47-S56
SPIE International Symposium on Microlectronics, MEMS and Nanotechnology location:Perth, AUSTRALIA date:Dec 2003
A technology computer aided design homemade tool, IMPACT, is described. The mechanical models and the numerical implementation are presented. Details are given about the methodology to calibrate and validate the implementation. This tool is used for the analysis of the processing of a micromachined cantilever. The originality of the study lies in (i) the capability to Simulate almost all the Sources of stress taking into account the complex rheological behaviours of the materials, (ii) the experimental determination of the mechanical properties of various thin film materials, and (iii) the validation of the calculations by direct comparisons with the measured deformations of the cantilever.