Vapor Phase Decomposition - Droplet Collection: Can we improve the collection efficiency for copper contamination?
De Gendt, Stefan Huber, A Onsia, B Arnauts, S Kenis, K Knotter, DM Mertens, PW Heyns, MM #
Trans tech-scitec publications ltd
Solid state phenomena vol:65-6 pages:93-96
This paper discusses the behavior of copper in various Vapor Phase Decomposition - Droplet Collection (VPD-DC) mixtures. The collection efficiency (CE) is studied as an equilibrium between outplating and collection of copper. A good mixture should demonstrate low metal outplating. Also, the driving force for metal to transfer from the wafer surface into the droplet should be high and quantitative. Only if these requirements are met, good collection efficiency is achievable.