Title: Impact of thermal treatment upon morphology and crystallinity of strontium titanate films deposited by atomic layer deposition
Authors: Popovici, Mihaela Ioana ×
Van Elshocht, Sven
Menou, Nicolas
Favia, Paola
Bender, Hugo
Rosseel, Erik
Swerts, Johan
Adelmann, Christoph
Vrancken, Christa
Moussa, Alain
Tielens, Hilde
Tomida, Kazuyuki
Pawlak, Malgorzata
Kaczer, Ben
Schoofs, Geert
Vandervorst, Wilfried
Wouters, Dirk
Kittl, Jorge #
Issue Date: Jan-2011
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:29 issue:1
Article number: 01A304
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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