Title: SOI n- and pMuGFET devices with different TiN metal gate tThickness under influence of sidewall crystal orientation
Authors: Rodrigues, M
Galeti, M
Martino, J.A
Collaert, Nadine
Simoen, Eddy
Claeys, Corneel
Issue Date: 2011
Publisher: Electrochemical Society, Inc
Host Document: Electrochemical Society Transactions - ECS Transactions vol:39 issue:1 edition:215 pages:222
Conference: 26th Symposium on Microelectronics Technology and Devices - SBMicro location:Joao Pessoa Brazil date:08/30/2011
ISSN: 1938-5862
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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