ITEM METADATA RECORD
Title: Impact of post-litho linewidth roughness smoothing processes on the post-etch patterning result
Authors: Foubert, Philippe ×
Vaglio Pret, Alessandro
Altamirano Sanchez, Efrain
Gronheid, Roel #
Issue Date: Jul-2011
Publisher: SPIE
Series Title: Journal of Micro/Nanolithography MEMS and MOEMS vol:10 issue:3 pages:33001
ISSN: 1537-1646
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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