Title: High-performance Ge MOS capacitors by O-2 plasma passivation and O-2 ambient annealing
Authors: Xie, Qi ×
Deng, Shaoren
Schaekers, Marc
Lin, Dennis
Caymax, Matty
Delabie, Annelies
Jiang, Yu-long
Qu, Xin-Pin
Deduytsche, Davy
Detavemier, Christophe #
Issue Date: 2011
Publisher: Institute of Electrical and Electronics Engineers
Series Title: IEEE Electron Device Letters vol:32 issue:12 pages:1656-1658
ISSN: 0741-3106
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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