Title: Effect of ultraviolet curing wavelength on low-k dielectric material properties and plasma damage resistance
Authors: Marsik, Premysl ×
Urbanowicz, Adam
Verdonck, Patrick
De Roest, David
Sprey, Hessel
Baklanov, Mikhaïl #
Issue Date: Mar-2011
Publisher: Elsevier Sequoia
Series Title: Thin Solid Films vol:519 issue:11 pages:3619-3626
ISSN: 0040-6090
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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