ITEM METADATA RECORD
Title: Saturation of front propagation in a reaction-diffusion process describing plasma damage in porous low-k materials
Authors: Safaverdi, Soghra ×
Barkema, Gerard
Kunnen, Eddy
Urbanowicz, Adam
Maes, Christian #
Issue Date: Jun-2011
Publisher: Published by the American Physical Society through the American Institute of Physics
Series Title: Physical Review B, Condensed Matter and Materials Physics vol:83 issue:24 pages:245320
ISSN: 1098-0121
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Semiconductor Physics Section
Theoretical Physics Section
× corresponding author
# (joint) last author

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