Title: Ultra shallow arsenic junctions in germanium formed by millisecond laser annealing
Authors: Hellings, Geert ×
Rosseel, Erik
Simoen, Eddy
Radisic, Dunja
Petersen, Dirch Hjorth
Hansen, Ole
Nielsen, Peter Folmer
Zschaetzsch, Gerd
Nazir, Aftab
Clarysse, Trudo
Vandervorst, Wilfried
Hoffmann, Thomas Y
De Meyer, Kristin #
Issue Date: 2011
Publisher: The Electrochemical Society
Series Title: Electrochemical and Solid-State Letters vol:14 issue:1 pages:H39-H41
ISSN: 1099-0062
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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