ITEM METADATA RECORD
Title: On the processing aspects of high performance hybrid backside
Authors: De Vos, Joeri ×
De Munck, Koen
Minoglou, Kiki
Ramachandra Rao, Padmakumar
Erismis, Mehmet Akif
De Moor, Piet
Sabuncuoglu Tezcan, Deniz #
Issue Date: Jul-2011
Publisher: IOP Publishing Ltd.
Series Title: Journal of Micromechanics and Microengineering vol:21 issue:7 pages:74006
ISSN: 0960-1317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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