Journal of Micromechanics and Microengineering
Publication date:
2011-07-01
Volume:
21
Pages:
74006 -
Publisher:
IOP Publishing Ltd.
Author:
De Vos, Joeri
De Munck, Koen ; Minoglou, Kiki ; Ramachandra Rao, Padmakumar ; Erismis, Mehmet Akif ; De Moor, Piet ; Sabuncuoglu Tezcan, Deniz
Keywords:
09 Engineering, 10 Technology, Nanoscience & Nanotechnology