Title: Towards 1X DRAM: Improved leakage 0.4 nm EOT STO-based MIMcap and explanation of leakage reduction mechanism showing further potential
Authors: Pawlak, Malgorzata
Kaczer, Ben
Wang, Wan-Chih
Kim, Min-Soo
Popovici, Mihaela Ioana
Swerts, Johan
Tomida, Kazuyuki
Opsomer, Karl
Schaekers, Marc
Vrancken, Christa
Govoreanu, Bogdan
Belmonte, Attilio
Demeurisse, Caroline
Debusschere, Ingrid
Altimime, Laith
Afanas'ev, Valeri
Kittl, Jorge #
Issue Date: 2011
Conference: Symposium on VLSI Technology location:Kyoto Japan date:06/13/2011
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Semiconductor Physics Section
# (joint) last author

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