Title: Mechanisms of oxygen precipitation in Cz-Si wafers subjected to rapid thermal anneals
Authors: Sarikov, Andrey ×
Litovchenko, Vladimir
Lisovskyy, Igor
Voitovich, Maria
Zlobin, Sergei
Kladko, Vasyl
Slobodyan, Nikolay
Machulin, Vladimir
Claeys, Corneel #
Issue Date: 2011
Publisher: Electrochemical Society
Series Title: Journal of the Electrochemical Society vol:158 issue:8 pages:H772-H777
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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