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Title: Novel approach to conformal FINFET extension doping
Authors: Zschaetzsch, Gerd
Hoffmann, Thomas Y
Horiguchi, Naoto
Hautala, Y
Shao, Y
Vandervorst, Wilfried
Issue Date: 2011
Host Document: ION IMPLANTATION TECHNOLOGY 2010 vol:1321 pages:23-26
Conference: Ion Implantation Technology 2010. 18th International Conference location:Kyoto Japan date:06/06/2010
ISBN: 978-0-7354-0876-0
ISSN: 0094-243X
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Nuclear and Radiation Physics Section

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