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Title: Growth and processing defects in CMOS homo- and hetero-epitaxy
Authors: Simoen, Eddy
Bargallo Gonzalez, Mireia
Eneman, Geert
Rosseel, Erik
Hikavyy, Andriy
Kobayashi, Daisuke
Loo, Roger
Caymax, Matty
Claeys, Corneel
Issue Date: 2011
Host Document: ECS Transactions vol:34 issue:1 pages:761-768
Conference: China Semiconductor Technology International Conference - CSTIC location:Shanghai China date:03/13/2011
ISBN: 978-1-60768-234-9
ISSN: 1938-5862
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems

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