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|ITEM METADATA RECORD
|Title: ||Growth and processing defects in CMOS homo- and hetero-epitaxy|
|Authors: ||Simoen, Eddy|
Bargallo Gonzalez, Mireia
|Issue Date: ||2011 |
|Host Document: ||ECS Transactions vol:34 issue:1 pages:761-768|
|Conference: ||China Semiconductor Technology International Conference - CSTIC location:Shanghai China date:03/13/2011|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Electrical Engineering - miscellaneous|
Associated Section of ESAT - INSYS, Integrated Systems
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