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Title: Role of copper in time dependent dielectric breakdown of porous organo-silicate glass low-k materials
Authors: Zhao, Larry ×
Pantouvaki, Marianna
Croes, Kristof
Tokei, Zsolt
Barbarin, Yohan
Wilson, Chris
Baklanov, Mikhaïl
Beyer, Gerald
Claeys, Corneel #
Issue Date: Nov-2011
Publisher: American Institute of Physics
Series Title: Applied Physics Letters vol:99 issue:22 pages:222110
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Department of Materials Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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