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Title: Sealing of poly-SiGe surface micromachined cavities for MEMS-above-CMOS applications
Authors: Gonzalez, Pilar ×
Guo, Bin
Varela Pedreira, Olalla
Severi, Simone
De Meyer, Kristin
Witvrouw, Ann
Issue Date: Nov-2011
Publisher: IOP Publishing Ltd.
Series Title: Journal of Micromechanics and Microengineering vol:21 issue:11 pages:115019
ISSN: 0960-1317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author

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