Title: Resolution-linewidth roughness-sensitivity performance tradeoffs for an extreme ultraviolet polymer bound photo-acid generator resist
Authors: Gronheid, Roel ×
Vaglio Pret, Alessandro
Rathsack, Benjamin
Hooge, Joshua
Scheer, Steven
Nafus, Kathleen
Shite, Hideo
Kitano, Junichi #
Issue Date: Jan-2011
Publisher: SPIE - International Society for Optical Engineering
Series Title: Journal of Micro/Nanolithography, MEMS, and MOEMS vol:10 issue:1 pages:13017
ISSN: 1932-5150
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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