Title: Evaluation of electron irradiated embedded SiGe source/drain diodes by Raman spectroscopy
Authors: Ohyama, Hidenori ×
Naka, N
Takakura, K
Tsunoda, I
Bargallo Gonzalez, Mireia
Simoen, Eddy
Claeys, Corneel #
Issue Date: Apr-2011
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:88 issue:4 pages:484-487
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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