Title: Systematic study of shallow junction formation on germanium substrates
Authors: Hellings, Geert ×
Rosseel, Erik
Clarysse, Trudo
Petersen, Dirch Hjorth
Hansen, Ole
Nielsen, Peter Folmet
Simoen, Eddy
Eneman, Geert
De Jaeger, Brice
Hoffmann, Thomas Y
De Meyer, Kristin
Vandervorst, Wilfried #
Issue Date: Apr-2011
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:88 issue:4 pages:347-350
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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