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Title: Study of metal barrier deposition-induced damage to porous low-k materials
Authors: Zhao, Larry ×
Volders, Henny
Baklanov, Mikhaïl
Tokei, Zsolt
Pantouvaki, Marianna
Wilson, Chris
Van Besien, Els
Beyer, Gerald
Claeys, Corneel #
Issue Date: Sep-2011
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:88 issue:9 pages:3030-3034
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Department of Materials Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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