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| ITEM METADATA RECORD |
| Title: | Study of metal barrier deposition-induced damage to porous low-k materials |
| Authors: | Zhao, Larry ×
Volders, Henny
Baklanov, Mikhaïl
Tokei, Zsolt
Pantouvaki, Marianna
Wilson, Chris
Van Besien, Els
Beyer, Gerald
Claeys, Corneel # |
| Issue Date: | Sep-2011 |
| Publisher: | North-Holland |
| Series Title: | Microelectronic Engineering vol:88 issue:9 pages:3030-3034 |
| ISSN: | 0167-9317 |
| Publication status: | published |
| KU Leuven publication type: | IT |
| Appears in Collections: | Department of Materials Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
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× corresponding author |
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# (joint) last author |
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