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Title: Evaluations of intrinsic time dependent dielectric breakdown of dielectric copper diffusion barriers
Authors: Zhao, Larry ×
Lofrano, Melina
Croes, Kristof
Van Besien, Els
Tokei, Zsolt
Wilson, Chris
Degraeve, Robin
Kauerauf, Thomas
Beyer, Gerald
Claeys, Corneel #
Issue Date: Oct-2011
Publisher: Elsevier Sequoia
Series Title: Thin Solid Films vol:520 issue:1 pages:662-666
ISSN: 0040-6090
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Department of Materials Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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