Title: Effect of high temperature annealing on tunnel oxide properties in TANOS devices
Authors: Arreghini, Antonio ×
Zahid, Mohammed
Van den Bosch, Geert
Suhane, Amit
Breuil, Laurent
Cacciato, Antonio
Van Houdt, Jan #
Issue Date: Jul-2011
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:88 issue:7 pages:1155-1158
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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