Title: Process challenges of MEMS harvesters and their effect on harvester performance
Authors: Vullers, Ruud ×
van Schaijk, Rob
Goedbloed, Martijn
Elfrink, Rene
Wang, Ziyang
Van Hoof, Chris #
Issue Date: 2011
Conference: IEEE International Electron Devices Meeting - IEDM location:Washington, CD USA date:12/05/2011
ISBN: 978-1-4577-0505-2
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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