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Title: Non-destructive characterization of activated ion-implanted doping profiles based on photomodulated optical reflectance
Authors: Bogdanowicz, Janusz
Clarysse, Trudo
Moussa, Alain
Mody, Jay
Eyben, Pierre
Vandervorst, Wilfried
Rosseel, Erik
Issue Date: 2011
Publisher: Amer inst physics
Host Document: Ion implantation technology 2010 vol:1321 pages:220-224
Conference: Ion Implantation Technology 2010. 18th International Conference location:Kyoto Japan date:06/06/2010
ISBN: 978-0-7354-0876-0
ISSN: 0094-243X
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Nuclear and Radiation Physics Section

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