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Title: Can we increase the efficiency of organic contamination removal by ozone/Di-water processes by using additives?
Authors: De Smedt, Frank ×
Vankerckhoven, Hans
De Gendt, Stefan
Heyns, MM
Vinckier, Christiaan #
Issue Date: Jan-2003
Publisher: Trans tech publications ltd
Series Title: Ultra clean processing of silicon surfaces v vol:92 pages:215-218
Abstract: Organic contamination can be removed either by ozone or by radical reactions. The relative importance of both mechanisms depends on the radical pool (RP). its magnitude is function of the pH and the presence of radical promotors and scavengers. In this paper an semi-empirical relation is derived between RP and the ozone decay rate under a wide variety of experimental conditions.
ISSN: 1012-0394
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Molecular Design and Synthesis
Quantum Chemistry and Physical Chemistry Section
× corresponding author
# (joint) last author

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