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|ITEM METADATA RECORD
|Title: ||Two-dimensional carrier mapping at the nanometer-scale on 32nm node targeted p-MOSFETs using high vacuum scanning spreading resistance microscopy|
|Authors: ||Eyben, Pierre ×|
Vandervorst, Wilfried #
|Issue Date: ||May-2012 |
|Publisher: ||Pergamon Press|
|Series Title: ||Solid-State Electronics vol:71 pages:69-73|
|Conference: ||International Conference on Ultimate Integration on Silicon - ULIS location:Cork Ireland date:03/14/2011|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Nuclear and Radiation Physics Section|
× corresponding author|
# (joint) last author|
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