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Title: Two-dimensional carrier mapping at the nanometer-scale on 32nm node targeted p-MOSFETs using high vacuum scanning spreading resistance microscopy
Authors: Eyben, Pierre ×
Clarysse, Trudo
Mody, Jay
Nazir, Aftab
Schulze, Andreas
Hantschel, Thomas
Vandervorst, Wilfried #
Issue Date: May-2012
Publisher: Pergamon Press
Series Title: Solid-State Electronics vol:71 pages:69-73
Conference: International Conference on Ultimate Integration on Silicon - ULIS location:Cork Ireland date:03/14/2011
ISSN: 0038-1101
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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