Title: Elastic relaxation evaluation in SiGe/Si hetero-epitaxial structures
Authors: Bargallo Gonzalez, Mireia
Naka, N
Hikavyy, Andriy
Eneman, Geert
Loo, Roger
Simoen, Eddy
Claeys, Corneel
Issue Date: 2011
Host Document: ULSI Process Integration 7 vol:41 issue:7 pages:181-189
Conference: 7th Symposium on ULSI Process Integration at the 220th Meeting of the Electrochemical-Society (ECS location:Boston, MA USA date:09-14 October 2011
ISBN: 978-1-60768-261-5
ISSN: 1938-5862
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems

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