Title: Enabling poly- SiGe MEMS scaling by improving anchor strength and resistance
Authors: Van Hoof, Rita ×
Bryce, George
Claes, Gert
Witvrouw, Ann
Severi, Simone #
Issue Date: Aug-2011
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:88 issue:8 pages:2420-2423
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Department of Materials Engineering - miscellaneous
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science