ITEM METADATA RECORD
Title: atom probe analysis of a 3D-finfet with high-k metal gate
Authors: Gilbert, Matthieu ×
Vandervorst, Wilfried
Koelling, Sebastian
Kambham, Ajay Kumar #
Issue Date: 2011
Publisher: North-Holland Pub. Co.
Series Title: Ultramicroscopy vol:111 issue:6 pages:530-534
ISSN: 0304-3991
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
Theoretical Physics Section
× corresponding author
# (joint) last author

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