ITEM METADATA RECORD
Title: Nanobeam diffraction: technique evaluation and strain measurement on complementary metal oxide semiconductor devices
Authors: Favia, Paola ×
Bargallo Gonzalez, Mireia
Simoen, Eddy
Verheyen, Peter
Klenov, Dmitri
Bender, Hugo #
Issue Date: 2011
Publisher: Electrochemical Society
Series Title: Journal of the Electrochemical Society vol:158 issue:4 pages:H438-H446
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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