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Title: A novel test method for simultaneous measurement of thermal conductivity, CTE, residual stress and Young's modulus of suspended thin films using a laser Doppler vibrometer
Authors: De Coster, Jeroen
Lofrano, Melina
Jansen, Roelof
Rottenberg, Xavier
Severi, Simone
Borremans, Jonathan
Van der Plas, Geert
Donnay, Stephane
Tilmans, Harrie
De Wolf, Ingrid #
Issue Date: 2011
Conference: 16th International Conference on Solid-State sensors, Actuators and Microsystems - Transducers location:Beijing China date:06/05/2011
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Department of Materials Engineering - miscellaneous
# (joint) last author

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