Title: Review of silicon nanowire oxidation
Authors: Shi, Xiaoping
Kurstjens, Rufi
Vos, Ingrid
Everaert, Jean-Luc
Schaekers, Marc #
Issue Date: 2011
Host Document: CHINA SEMICONDUCTOR TECHNOLOGY INTERNATIONAL CONFERENCE 2011 (CSTIC 2011) vol:34 issue:1 pages:535-540
Series Title: ECS Transactions
Conference: China Semiconductor Technology International Conference - CSTIC location:Shanghai China date:03/13/2011
ISBN: 978-1-60768-234-9
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Non-KU Leuven Association publications
# (joint) last author

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