Title: CHC degradation of strained devices based on SiON and high-k gate dielectric materials
Authors: Amat, E ×
Rodriguez, R
Bargallo Gonzalez, Mireia
Martin-Martinez, J
Nafria, M
Aymerich, X
Verheyen, Peter
Simoen, Eddy #
Issue Date: 2011
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:88 issue:7 pages:1408-1411
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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