Title: Evaluation of metallization options for advanced Cu interconnects application
Authors: Jourdan, Nicolas ×
Carbonell, Laure
Heylen, Nancy
Swerts, Johan
Armini, Silvia
Maestre Caro, Arantxa
Demuynck, Steven
Croes, Kristof
Beyer, Gerald
Tokei, Zsolt
Van Elshocht, Sven
Vancoille, Eric #
Issue Date: 2011
Host Document: China semiconductor technology international conference 2011 (cstic 2011) vol:34 issue:1 pages:515-521
Conference: China Semiconductor Technology International Conference - CSTIC location:Shanghai china date:03/13/2011
ISBN: 978-1-60768-234-9
ISSN: 1938-5862
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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