Title: Advanced use of therma-probe for ultra-shallow junction monitoring
Authors: Bogdanowicz, Janusz
Clarysse, Trudo
Smets, Gerrit
Rosseel, Erik
Vandervorst, Wilfried
Issue Date: 2011
Conference: Frontiers of Characterization and Metrology for Nanoelectronics location:Grenoble France date:05/23/2011
ISBN: 978-0-7354-0965-1
ISSN: 0094-243X
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Nuclear and Radiation Physics Section

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