Title: A DLTS study of SiO2 and SiO2/SiNx surface passivation of silicon
Authors: Simoen, Eddy ×
Gong, Chun
Posthuma, Niels
Van Kerschaver, Emmanuel
Poortmans, Jozef
Mertens, Robert Pierre #
Issue Date: 2011
Publisher: Electrochemical Society
Series Title: Journal of the Electrochemical Society vol:158 issue:6 pages:H612-H617
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - ELECTA, Electrical Energy Computer Architectures
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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