|ITEM METADATA RECORD
|Title: ||Fin pitch impact on biaxial/uniaxial strain engineering of triple-gate devices|
|Authors: ||Rodrigues, M|
|Issue Date: ||2011 |
|Publisher: ||Electrochemical Society, Inc|
|Host Document: ||Electrochemical Society Transactions - ECS Transactions vol:35 issue:5 pages:151-156|
|Conference: ||Advanced Semiconductor-on-Insulator Technology and Related Physics 15 location:Montreal Canada date:05/01/2011|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
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