Title: Fin pitch impact on biaxial/uniaxial strain engineering of triple-gate devices
Authors: Rodrigues, M
Sonnenberg, V
Martino, J.A
Collaert, Nadine
Simoen, Eddy
Claeys, Corneel
Issue Date: 2011
Publisher: Electrochemical Society, Inc
Host Document: Electrochemical Society Transactions - ECS Transactions vol:35 issue:5 pages:151-156
Conference: Advanced Semiconductor-on-Insulator Technology and Related Physics 15 location:Montreal Canada date:05/01/2011
ISBN: 978-1-60768-216-5
ISSN: 1938-5862
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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