Title: Reliability performance of advanced metallization options for 30nm ½ pitch in SiCOH low-k materials
Authors: Croes, Kristof ×
Demuynck, Steven
Siew, Yong Kong
Wilson, Chris
Heylen, Nancy
Beyer, Gerald
Tokei, Zsolt #
Issue Date: 2011
Conference: IEEE International Interconnect Technology Conference and Materials for Advanced Metallization - IITC/MAM location:Dresden Germany date:05/09/2011
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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