Title: Void detection in copper interconnects using Energy Dispersive X-Ray Spectroscopy
Authors: Tsigkourakos, Menelaos - Charalampos
Hantschel, Thomas
Franquet, Alexis
Conard, Thierry
Carbonell, Laure
Vandervorst, Wilfried #
Issue Date: 2011
Conference: International Conference on Frontiers of Characterization and Metrology for Nanoelectronics location:Grenoble France date:05/24/2011
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Nuclear and Radiation Physics Section
# (joint) last author

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