|ITEM METADATA RECORD
|Title: ||Void detection in copper interconnects using Energy Dispersive X-Ray Spectroscopy|
|Authors: ||Tsigkourakos, Menelaos - Charalampos|
Vandervorst, Wilfried #
|Issue Date: ||2011 |
|Conference: ||International Conference on Frontiers of Characterization and Metrology for Nanoelectronics location:Grenoble France date:05/24/2011|
|Publication status: ||published|
|KU Leuven publication type: ||IMa|
|Appears in Collections:||Nuclear and Radiation Physics Section|
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