Title: Built-in self-limitation of masked aluminium anodization using photoresist
Authors: Zekry, Joseph ×
Celis, Jean-Pierre
Tezcan, Deniz S.
Puers, Bob
Van Hoof, Chris
Tilmans, Harrie #
Issue Date: Sep-2011
Publisher: Elsevier
Series Title: Procedia Engineering
Conference: Eurosensors XXV location:Athens, Greece date:4-7 September 2011
ISSN: 1877-7058
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Associated Section of ESAT - INSYS, Integrated Systems
Surface and Interface Engineered Materials
× corresponding author
# (joint) last author

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