|ITEM METADATA RECORD
|Title: ||Development of a wet silicon removal process for replacement metal gate and sacrificial fin|
|Authors: ||Suhard, S|
De Gendt, Stefan
|Issue Date: ||Oct-2011 |
|Host Document: ||SEMICONDUCTOR CLEANING SCIENCE AND TECHNOLOGY 12 (SCST 12) vol:41 issue:5 pages:51-56|
|Conference: ||The Electrochemical Society location:Boston date:October, 2011|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Molecular Design and Synthesis|
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