Title: Development of a wet silicon removal process for replacement metal gate and sacrificial fin
Authors: Suhard, S
Sebaai, F
Pacco, A
Veloso, A
Carbonell, L
Claes, M
Struyf, H
Mertens, P
De Gendt, Stefan
Issue Date: Oct-2011
Host Document: SEMICONDUCTOR CLEANING SCIENCE AND TECHNOLOGY 12 (SCST 12) vol:41 issue:5 pages:51-56
Conference: The Electrochemical Society location:Boston date:October, 2011
ISBN: 978-1-60768-259-2
ISSN: 1938-5862
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Molecular Design and Synthesis

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