Title: Generation of plama in liquid using RF and ultrasounds
Authors: Camerotto, Elisabeth
De Schepper, Peter
Brems, S
Callant, I
Shamiryan, D
Boullart, W
De Gendt, Stefan #
Issue Date: May-2011
Conference: 4th International Workshop on Plasma Etch and Strip in Microelectronics - PESM location:Mechelen, Belgium date:5-6 May, 2011
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Molecular Design and Synthesis
# (joint) last author

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