Title: Aluminium Oxide Atomic Layer Deposition on Semiconductor Substrates
Authors: Delabie, Annelies
Sioncke, Sonja
Rip, Jens
Van Elshocht, Sven
Pourtois, Geoffrey
Mueller, Matthias
Beckhoff, Burkhard
Pierloot, Kristine
Issue Date: 2011
Publisher: Electrochemical Society, Inc
Host Document: Electrochemical Society Transactions - ECS Transactions vol:41 issue:3 pages:149-160
Conference: 9th International Symposium on High Dielectric Constant and Other Dielectric Materials for Nanoelectronics and Photonics/220th Meeting of the Electrochemical-Society location:Boston, MA date:OCT 10-12, 2011
ISBN: 978-1-56677-903-6
ISSN: 1938-5862
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Quantum Chemistry and Physical Chemistry Section

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