Title: Carbon nanotube-carbon nanotube contacts as an alternative towards low resistance horizontal interconnects
Authors: Santini, Claudia A ×
Volodin, Alexander
Van Haesendonck, Chris
De Gendt, Stefan
Groeseneken, Guido
Vereecken, Philippe #
Issue Date: Oct-2011
Publisher: Pergamon Press
Series Title: Carbon vol:49 issue:12 pages:4004-4012
Abstract: We propose to use carbon nanotube (CNT)-CNT contacts instead of CNT-metal contacts as a route towards low resistance CNT horizontal interconnects. We characterize by electrical transport measurements and Kelvin probe force microscopy the contacts present in CNT horizontal interconnects grown by chemical vapor deposition between titanium nitride electrodes.
ISSN: 0008-6223
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Molecular Design and Synthesis
Solid State Physics and Magnetism Section
ESAT - MICAS, Microelectronics and Sensors
Centre for Surface Chemistry and Catalysis
× corresponding author
# (joint) last author

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