Title: Oxidation of silicon in the afterglow of microwave induced plasmas
Authors: Vinckier, Christiaan ×
Coeckelberghs, P
Stevens, G
Dejaegere, S #
Issue Date: Jan-1987
Publisher: Elsevier science bv
Series Title: Applied surface science vol:30 issue:1-4 pages:40-46
ISSN: 0169-4332
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Molecular Design and Synthesis
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science