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Metrology International Conference, Date: 2011/10/03 - 2011/10/06, Location: Paris

Publication date: 2011-10-01

Metrology International Conference

Author:

Pétry, Jasmine
Kotte, Gerard ; Pirée, Hugo ; Maeck, M ; Piot, Jan ; Pétry, A

Keywords:

Nanometrology, Atomic force microscopy, Carbon nanotubes

Abstract:

For security and quality reasons, dimensions of carbon nanotubes need to be measured correctly. The traceability ensures the quality of the measurement. In Belgium, SMD and the KULeuven are developing traceable measurements at the nanoscale, primary by building a metrological AFM and secondary by setting up comparison measurement methods. Hereafter, we present a new measurement method of carbon nanotubes diameter by comparison with reference nanoparticles, on a commercial AFM. In order to overcome non-metrological effects of the AFM, we measure simultaneously carbon nanotubes and reference nanoparticles. The analysis concludes on the mean diameter of the carbon nanotubes and its standard deviation.