Title: Advanced cleaning for the growth of ultrathin gate oxide
Authors: Mertens, PW
Bearda, T
Houssa, Michel
Loewenstein, LM
Cornelissen, I
De Gendt, Stefan
Kenis, K
Teerlinck, I
Vos, R
Meuris, M
Heyns, MM #
Issue Date: Jan-1999
Publisher: Elsevier science bv
Series Title: Microelectronic Engineering vol:48 issue:1-4 pages:199-206
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Semiconductor Physics Section
Molecular Design and Synthesis
# (joint) last author

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