ITEM METADATA RECORD
Title: Cleaning procedures for uhv cluster-tool mos fabrication
Authors: Sofield, Cj
Murrell, Mp
Sugden, S
Heyns, Marc
Verhaverbeke, S
Welland, Me
Golan, B
Barnes, J #
Issue Date: 1992
Publisher: Materials research soc
Host Document: Chemical Surface Preparation, Passivation and Cleaning for Semiconductor Growth and Processing vol:259 pages:105-111
Series Title: Materials Research Society Symposium Proceedings
Conference: Symposium on Chemical Surface Preparation, Passivation and Cleaning for Semiconductor GrowthTH AND PROCESSING, AT THE 1992 SPRING MEETING OF THE MATERIALS RESEARCH SOC SAN FRANCISCO, CA, APR 27-29, 1992
ISBN: 1-55899-154-9
ISSN: 0272-9172
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Department of Materials Engineering - miscellaneous
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy

 




All items in Lirias are protected by copyright, with all rights reserved.

© Web of science