Title: Wafer preparation: Ultra-clean processing and Si-material defects
Authors: Heyns, Marc
Hattori, T #
Issue Date: 1998
Publisher: Electrochemical Society Inc
Host Document: Silicon Materials Science and Technology, vols 1 and 2 pages:589-591
Conference: 8th International Symposium on Silicon Materials Science and Technology location:San Diego, CA, USA date:4-8 April 1998
ISBN: 1-56677-193-5
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Department of Materials Engineering - miscellaneous
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science