|ITEM METADATA RECORD
|Title: ||Wafer preparation: Ultra-clean processing and Si-material defects|
|Authors: ||Heyns, Marc|
Hattori, T #
|Issue Date: ||1998 |
|Publisher: ||Electrochemical Society Inc|
|Host Document: ||Silicon Materials Science and Technology, vols 1 and 2 pages:589-591|
|Conference: ||8th International Symposium on Silicon Materials Science and Technology location:San Diego, CA, USA date:4-8 April 1998|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Department of Materials Engineering - miscellaneous|
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