Title: Fabrication of porous membranes for MEMS packaging by one-step anodization in sulfuric acid
Authors: Rico, R. Hellin ×
Du Bois, B
Witvrouw, Ann
Van Hoof, Chris
Celis, Jean-Pierre #
Issue Date: 2007
Publisher: Electrochemical Society
Series Title: Journal of the Electrochemical Society vol:154 issue:9 pages:K74-K78
Abstract: nonlithographic fabrication method that exploits the pore structure of anodic aluminum oxide to fabricate alumina porous membranes for microelectromechanical system ( MEMS ) packaging is proposed. This method allows wafer level packaging of MEMS devices at low temperature. We report on initial experiments indicating the feasibility of the technique. Patterned porous alumina films are formed by anodizing aluminum films on wafer substrates using sulfuric acid electrolytes. The etching of the barrier layer through the porous membrane by a plasma using a CF4 + O-2 gas mixture, and the evidence of pore opening required for the release of a sacrificial MEMS layer are presented. (c) 2007 The Electrochemical Society.
ISSN: 0013-4651
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Chemical and Extractive Metallurgy Section (-)
ESAT - MICAS, Microelectronics and Sensors
Department of Materials Engineering - miscellaneous
× corresponding author
# (joint) last author

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